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1、無 錫 職 業(yè) 技 術(shù) 學(xué) 院 畢業(yè)設(shè)計(jì)說明書（英文翻譯） 原文 The 21stCentury’s Silicon microelectronics 1．Introduction Looking at the development of human society in the history of civilization, all the production mode and lifestyle of the major and new technologies have caused, science and technology as revolutio

2、nary force, and promote the development of human society. More than 50 years ago from the invention of the transistor to the current microelectronics technology to become the basis of the information society and the historical development of the core fully proved that "science and technology are the

3、 primary productive forces." Information is objective things state and the characteristics of a universal movement forms, together with the materials and energy is an important resource for human society, but its use is just the beginning. Currently facing the information revolution to digitalizatio

4、n and networking as a feature. Digital has greatly improved the peoples access to information, and better meet the peoples demand for information, and network makes it more convenient for people to exchange information so that the entire planet into a "global village." To the digital and network cha

5、racteristics of information technology into the same general technical different, it is highly permeable and infrastructure, it can infiltrate and transform the various industries and sectors, changes in the production and human lifestyles, changing economic patterns and the social, political, cultu

6、ral and other fields. And it is one of the foundations of microelectronics technology. It is no exaggeration to say that no progress in microelectronics technology, it is impossible today the vigorous development of information technology, microelectronics has become a cornerstone of the development

7、 of the information society. For more than 50 years history of the development of microelectronic technology is, in fact, the process of continuous innovation, including innovation here refers to the original innovation, technological innovation and application of innovation. The invention of the t

8、ransistor is not an isolated carefully designed experiment, but rather a series of solid physics and semiconductor physics, materials science major breakthrough was achieved after the inevitable result. 1947 point-contact transistor invention, in 1948 invented junction field effect transistor and th

9、e subsequent silicon planar technology, integrated circuits, CMOS technology, semiconductor random access memory, CPU, non-volatile memory, such as the microelectronics field of the invention are also a series of major innovation results manifest. At the same time, each of the major inventions are a

10、lso open up a new field, has brought new huge market for our production and lifestyles have had a significant impact. It is precisely due to the field of microelectronics technology innovation can make microelectronic integrated able to quadruple every three years, features smaller times the speed o

11、f sustainable development for decades. Since 1968, and silicon technology-related theses and has already surpassed the number of steel-related academic papers, the view was expressed that, after 1968 following the mankind enters the stone, bronze, iron age after the era of silica (silicon age).There

12、fore we can say is the essence of social development innovation, there is no innovation, the community can only be imprisoned in the "super-steady-state" trap. Although innovation as a driving force for economic development in the reform of the community will often "creativdestruction", but after th

13、is destruction, will start at a new higher level of innovation cycle, society is in such spiral of the way forward. In the microelectronics technology development for the first 50 years, innovation has played a decisive role in the future, the development of microelectronics technology will depend

14、on the outcome of a series of innovative emerging. We believe that: At present, microelectronic technology has been developed to a very critical period, the first half of the 21st century, which is the next 50 years the development of microelectronics technology trends and the major innovation mainl

15、y in the following four aspects: to silicon-based CMOS circuits as the mainstream technology; system-on-chip (System On A Chip SOC) for the development focus of quantum electronic devices and molecules (atoms) self-assembly of nano-technology-based e-learning with other disciplines with the birth of

16、 new technology growth points, such as MEMS, such as DNA Chip. 2．21 century will continue to the first half of the silicon-based CMOS circuits of the mainstream Microelectronics technology development goal is to continuously improve the performance of the system integration and cost-effective, and

17、 therefore call for an increase in chip integration, which is constantly shrinking semiconductor devices feature size power source. To MOS technology as an example, narrowing the channel length can increase the speed of integrated circuits; at the same time narrowing the channel length and width can

18、 be reduced device size, integration, the chip integrates a greater number of transistors, the structure will be more complicated, Performance improved in the electronic system integration on a single chip; In addition, with the enhancement of integration, the systems speed and reliability have also

19、 greatly improved, a sharp price drop. The on-chip signal delay of less than the signal delay chip, so the device smaller, even if the device itself does not enhance performance, the performance of the integrated system can be greatly improved. Since the invention of the integrated circuit in

20、1958, in order to enhance the performance of electronic systems, reduce costs, and microelectronic devices feature size is shrinking, continuously improve processing accuracy, and the silicon area escalating. The development of integrated circuit chips basically followed the Intel co-founder of the

21、Gordon E. Moore predicted by Moores Law in 1965, that is, every three years of integration increased four times, feature smaller times. During this period, although there are many who predict this trend will slow, but the development of the microelectronics industry for more than 30 years the situat

22、ion confirmed Moores prediction [2]. And according to our projections, the development of microelectronic technology of this trend will continue in the 21st century, a period of time, it is any other industry can match the. 360畢業(yè)設(shè)計(jì)網(wǎng) Now, 0.18-micron CMOS process technology in the microelectronics

23、industry has become a mainstream technology, 0.035 and 0.020 micron micron device has been successful in the laboratory preparation, research work has entered the sub-0. 1-micron technology stage, the corresponding gate oxide thickness of only 2.0 to 1.0 nm. It is estimated that by 2010, the feature

24、 size of 0.05 to 0.07 microns 64 GDRAM products will be in production. The 21st century, at least the first half of the 21st century, microelectronics production technology will continue to reduce the size of the silicon-based CMOS process technology into the mainstream. Although micro-electro

25、nics and other compounds in the research of new materials made a lot of progress, but not replace silicon-based technology with the conditions. According to the laws governing the development of science and technology, from the birth of a new technology to become a mainstream technology generally re

26、quire 20 to 30 years, silicon integrated circuit technology since the invention of transistors in 1947 invention of the integrated circuit in 1958 to the late 1960s also develop into a major industry after more than two decades of time. In addition, around the world in trillions of dollars in equipm

27、ent and technology, has been a very powerful silicon-based technology industry capacity; At the same time, long-term research and development investments have been causing people to silicon and its derivatives to various attributes of a very in-depth understanding of very thorough state, as more tha

28、n 100 kinds of natural elements, the most This is a very valuable accumulation of knowledge. Industry capacity decisions and the accumulation of knowledge of the silicon-based technology will be at least 50 years still play an important role, people will not give up easily. At present, many people t

29、hink that when the feature size of microelectronics technology in 2015reached 0.030 ~ 0.015 microns, "limit", the silicon technology will be the end of the era, and this is actually a misunderstanding. Leaving aside the microelectronics technology in addition to representatives of feature size of th

30、e processing technology, but alsodesign, system architecture, and other aspects of the strong need for further development of these technologies will enable the development of the microelectronics industry to continue its rapid growth. Even the processing technology, many well-known in the microelec

31、tronics experts also predicted that the microelectronics industry will be like in 2030 about entering the auto industry, the aviation industry, this relatively mature Chaoyang industrial fields. Even if the microelectronics industry into the automotive, aerospace and other industrial sectors mature,

32、 it will continue to maintain a rapid development trend, like automotive, aerospace industry has developed more than 50 years is still the same great development potential. With the device feature size is getting smaller and smaller, will inevitably encounter device structure, the key technology, i

33、ntegration technologies and materials in a series of problems, the reason is mainly: The laws of physics, and other scientific awareness of the problem also remain in the birth and development ofintegratedcircuits formed by the early classical or semi-classical theory on the basis of these theories

34、to describe micron for the microelectronics devices, but the space for nano-scale magnitude and spatial scales of the order of femtosecond of the new system-on-chip device is difficult to apply in the material system, the SiO2 gate dielectric material, polysilicon / silicide gate electrode, and othe

35、r traditional materials due to the material properties of the constraints, have failed to meet the 50-nanometer devices and circuits in demand At the same time the structure of the traditional devices have failed to meet the 50-nanometer devices, we must develop a new type of device structure and mi

36、cro-machining, interconnection, and integration of key technology. Specific needs innovation and the development of key areas, including: Based on quantum physics and mesoscopic semiconductor devices based on the transport theory, the device model, simulation and simulation software, the new device

37、structure, high-k gate dielectric material and a new gate structure, and electron beam stepper, 13 nmEUV lithography, etching ultrafine lines, SOI, GeSi / Si, and other silicon-based technology compatible with the new circuit, and low-K dielectric Cu interconnect devices and nanotechnology and quant

38、um electronic devices and the integration of technology . 3．system-on-chip (System On A Chip) is a 21st century focus on the development of microelectronic technology In the integrated circuit (IC) the early stage of development, circuit design are from the physical layout device start later in th

39、e unit for integrated circuits (Cell-Lib), made from the device-level integrated circuit design into the logic level, the design of such a large number of circuit and logic designers can directly participate in the design of integrated circuits, and greatly promote the development of the IC industry

40、. But IC is only a semi-finished, it only complete machine system can be put into play its role. IC chip through the printed circuit board (PCB) techniques to achieve complete machine system. Although the IC can be very high speed, power consumption can be very small, but because of PCB board connec

41、tion between the IC chip delay, PCB board reliability and weight and other factors, complete machine system performance by a lot of restrictions. With the system to the high-speed, low-power, low-voltage and multi-media, network, and the development of mobile, the system of the increasingly high dem

42、ands of the circuit, the traditional integrated circuit design technology has been unable to meet the increasing performance of the complete machine system requirements . At the same time, IC design technology and the level of integrated circuit scale is growing, becoming more complex, the whole sys

43、tem can be integrated into a single chip. Now can be integrated in a chip 108-109 transistors, and along with the development of microelectronics manufacturing technology, the 21st century microelectronics technology from the current 3 times the progressive development of G T to 3 times (that is, by

44、 the G-storage development T-bit, integrated circuit devices from the speed of light to the development of THz GHz, the data transfer rate from Gbps development Tbps, Note: 1 G = 109,1 T = 1012, bps: median per-second data transmission). It is in traction and technology-driven demand for the dual

45、 role, there will be a system-wide integrated microelectronics chip system-on-chip (System On A Chip, or SOC) concept. System-on-Chip (SOC) integrated circuits (IC) design idea is different, it is the field of microelectronics design a revolution, and integrated circuits, and then the relation

46、ship between the IC and discrete components similar to the relationship, its micro - Electronics role in promoting inferior since the late 1950s with the rapid development of integrated circuit technology. SOC is from the perspective of the whole system, a mechanism for handling model algorithm, th

47、e chip architecture, the circuit level until the devices are designed to closely integrate, in a single (or a few) chip to complete the function of the system as a whole, it must be designed Behavioral system from the beginning of top-down (Top-Down). Many studies show that the system and IC compone

48、nts compared to SOC design as integrated and holistic consideration of the various situations throughout the system, in the same process technology to achieve better performance under the conditions of the target system. For example, the use of methods and SOC 0.35 μ m system-on-chip design technolo

49、gy, the complexity of the systems in the same degree and handling rate, equivalent to a 0.18 to 0.25 μ m IC production process achieved by the same system performance; Also, using conventional IC chip design method compared with SOC design methodology required to perform the same function of the num

50、ber of transistors can be reduced about l ~ 2 orders of magnitude. The system-on-chip (SOC) development, there are three key technical support. (1) hardware and software co-design technology. Different systems for the hardware and software functional theory (Functional Partition Theory), where t

51、he system involves many different computer systems, communications systems, data compression and encryption and decryption of compression systems. (2) the issue of IP module. IP has three modules, namely, soft core, the main function is described solid nucleus, mainly for structural design; and h

52、ard core, based on the physical design process, and process-related, and tested through the process. A hard core of the highest value. CMOS CPU, DRAM, SRAM, Flash Memory and E2PROM and A / D, D / A, and so can be a hard core. In particular, based on the new deep submicron device and circuit simulati

53、on model, based on the speed and on the optimization of power and have the greatest tolerance of the most valuable module. Now, the Silicon Valley in the 1980s without a production line (Fabless) companies on the basis of the late 1990s and there have been some not-chip (Chipless) company, specializ

54、ed sales IP module. (3) the interface module integrated analysis technology, which includes IP module of the glue logic technology (glue logic technologies) and IP modules and the realization of comprehensive analysis technology. Technologies change from the IC to the SOC is not only a conceptual b

55、reakthrough, but also the development of new information technology milestone. Through the above three support technology innovation, it will certainly lead to another system-on-chip-based information technology revolution. At present, the SOC technology has emerged, and the 21st century will be the

56、 SOC technology truly a period of rapid development. In the area of next-generation system-on-chip, the need for breakthroughs in key areas of innovation, including the realization of the main features of the algorithm and system structure of the circuit two aspects. In the history of the develop

57、ment of microelectronic technology, each of the proposed algorithm will lead to a transformation, such as the Viterbi Algorithm, wavelet transform and so on the development of integrated circuit design technology has played a very important role, neural networks, fuzzy Algorithms are also likely mad

58、e great breakthroughs. A new structure of the circuit can lead a series of applications, but proposes a new algorithm which can motivate a new area, it should be in the future algorithm research in the field of system-on-chip one of the key disciplines. In the structure of the circuit, in the system

59、-on-chip, since the RF, memory addition, the circuit structure which is not the traditional sense of the CMOS structure, it was necessary to develop a more nimble structure of the new circuit. In addition, in order to achieve the glue logic (Glue Logic) new logic array technology is expected to be r

60、apid development in this system also needs to be done in-depth research. 4．Conclusion Microelectronics in the development of the first 50 years of innovation and basic research has played a crucial and decisive role. As device feature size reduction, the emergence of nano-electronics, the developm

61、ent of a new generation of SOC, MEMS and the rise of DNA chips, and put forward a series of new issues, is an objective demand, "calls" the outcome of the birth of innovation. Looking back at the 20th century, after 50 years, the 21th century ago 50, 100 years of scientific and technological deve

62、lopment of microelectronics, we feel deeply that the microelectronics technology at the turn of the century for us is a major opportunity, but also a serious challenges, and if we are able to seize this opportunity, based on innovation, to be bold in taking up this challenge, it is possible that Chi

63、nas microelectronics technology to achieve rapid growth, a new generation of microelectronics technology have their own intellectual property rights, the promotion of Chinas microelectronics industry development, and to greet the middle of the 21st century will be the arrival of the great national r

64、ejuvenation lay the technical foundation for the Chinese nation to Recasting the brilliant! 譯 文 21世紀(jì)的硅微電子學(xué) 1、引　言 綜觀人類社會(huì)發(fā)展的文明史，一切生產(chǎn)方式和生活方式的重大變革都是由于新的科學(xué)發(fā)現(xiàn)和新技術(shù)的產(chǎn)生而引發(fā)的，科學(xué)技術(shù)作為革命的力量，推動(dòng)著人類社會(huì)向 前發(fā)展。從50多年前晶體管的發(fā)明到目前微電子技術(shù)成為整個(gè)信息社會(huì)的基礎(chǔ)和核心的發(fā)展歷史充分證明了“科學(xué)技術(shù)是第一生產(chǎn)力”。信息是客觀事物狀態(tài)和運(yùn) 動(dòng)特征的一種普遍形式，與材料和能

65、源一起是人類社會(huì)的重要資源，但對(duì)它的利用卻僅僅是開始。當(dāng)前面臨的信息革命以數(shù)字化和網(wǎng)絡(luò)化作為特征。數(shù)字化大大改善 了人們對(duì)信息的利用，更好地滿足了人們對(duì)信息的需求；而網(wǎng)絡(luò)化則使人們更為方便地交換信息，使整個(gè)地球成為一個(gè)“地球村”。以數(shù)字化和網(wǎng)絡(luò)化為特征的信息 技術(shù)同一般技術(shù)不同，它具有極強(qiáng)的滲透性和基礎(chǔ)性，它可以滲透和改造各種產(chǎn)業(yè)和行業(yè)，改變著人類的生產(chǎn)和生活方式，改變著經(jīng)濟(jì)形態(tài)和社會(huì)、政治、文化等各 個(gè)領(lǐng)域。而它的基礎(chǔ)之一就是微電子技術(shù)?？梢院敛豢鋸埖卣f，沒有微電子技術(shù)的進(jìn)步，就不可能有今天信息技術(shù)的蓬勃發(fā)展，微電子已經(jīng)成為整個(gè)信息社會(huì)發(fā)展的基石。 50多年來微電子技術(shù)的發(fā)展歷史，

66、實(shí)際上就是不斷創(chuàng)新的過程，這里指的創(chuàng)新包括原始創(chuàng)新、技術(shù)創(chuàng)新和應(yīng)用創(chuàng)新等。晶體管的發(fā)明并不是一個(gè)孤 立的精心設(shè)計(jì)的實(shí)驗(yàn)，而是一系列固體物理、半導(dǎo)體物理、材料科學(xué)等取得重大突破后的必然結(jié)果。1947年發(fā)明點(diǎn)接觸型晶體管、1948年發(fā)明結(jié)型場(chǎng)效應(yīng)晶 體管以及以后的硅平面工藝、集成電路、CMOS技術(shù)、半導(dǎo)體隨機(jī)存儲(chǔ)器、CPU、非揮發(fā)存儲(chǔ)器等微電子領(lǐng)域的重大發(fā)明也都是一系列創(chuàng)新成果的體現(xiàn)。同時(shí)每一項(xiàng)重大發(fā)明又都開拓出一個(gè)新的領(lǐng)域，帶來了新的巨大市場(chǎng)，對(duì)我們的生產(chǎn)、生活方式產(chǎn)生了重大的影響。也正是由于微電子技術(shù)領(lǐng)域的不斷創(chuàng)新，才能使微電 子能夠以每三年集成度翻兩番、特征尺寸縮小倍的速度持續(xù)發(fā)展幾十年。自1968年開始，與硅技術(shù)有關(guān)的學(xué)術(shù)論文數(shù)量已經(jīng)超過了與鋼鐵有關(guān)的學(xué)術(shù)論文，所以 有人認(rèn)為，1968年以后人類進(jìn)入了繼石器、青銅器、鐵器時(shí)代之后硅石時(shí)代（silicon age）〖1〗。因此可以說社會(huì)發(fā)展的本質(zhì)是創(chuàng)新，沒有創(chuàng)新，社會(huì)就只能被囚禁在“超穩(wěn)態(tài)”陷阱之中。雖然創(chuàng)新作為經(jīng)濟(jì)發(fā)展的改革動(dòng)力往往會(huì)給社會(huì)帶來 “創(chuàng)造性的破壞”，但經(jīng)過這種破壞后，又將開始